| Metrology area, Sub-field | Length, Dimensional Metrology |
| Description | Nanometrology: line scale standards |
| Time of measurements | 2000 - 2002 |
| Status | Approved |
| Final Reports of the comparisons | |
| Measurand | Main graduation: 4 µm line width, 1 mm line length, 1 mm pitch, Auxiliary measuring line with test structures |
| Transfer device | Two standards with identical layout (total length: 280 mm): one made of glass ceramic Zerodur, one made of fused silica |
| Comparison type | Supplementary Comparison |
| Consultative Committee | CCL (Consultative Committee for Length ) |
| Conducted by | CCL (Consultative Committee for Length ) |
| Comments |
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| Pilot institute |
PTB
Physikalisch-Technische Bundesanstalt Germany |
| Contact person | H. Bosse +49 (0) 531 592 5200 |
| Pilot laboratory | |
|---|---|
| PTB |
Physikalisch-Technische Bundesanstalt, Germany, EURAMET |
| BNM-LNE |
Bureau National de Métrologie - Laboratoire National d'Essais, France, EURAMET |
| CMS/ITRI |
Industrial Technology Research Institute/Center for Measurement Standards, Chinese Taipei, APMP |
| CNR-IMGC |
Consiglio Nazionale delle Ricerche - Istituto di Metrologia G. Colonnetti (until 2006), Italy, EURAMET |
| METAS |
Federal Institute of Metrology, Switzerland, EURAMET |
| MIKES |
VTT Technical Research Centre of Finland Ltd, Centre for Metrology/Mittatekniikan keskus, Finland, EURAMET |
| NIM |
National Institute of Metrology, China, APMP |
| NIST |
National Institute of Standards and Technology, United States, SIM |
| NMIJ AIST |
National Metrology Institute of Japan, Japan, APMP |
| NRC |
National Research Council, Canada, SIM |
| SP |
Technical Research Institute of Sweden from 2017 Research Institutes of Sweden AB, Sweden, EURAMET |
| VNIIM |
D.I. Mendeleyev Institute for Metrology, Rosstandart, Russian Federation, COOMET |
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